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Tue 25 |
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Wed 26 |
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Thu 27 |
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08:00-08:15 |
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Opening - Christopher J. Wilson (imec, Belgium) |
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Chairperson: Christopher Wilson & Stefan Schulz |
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08:15-08:55 |
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KEYNOTE |
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Materials Innovations Driving AI |
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Paul Besser,
Entegris, USA |
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08:55-09:35 |
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KEYNOTE |
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Materials, Processes, and Characterization: Insights from the Past for Advancing Interconnect Developments |
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Shinichi Ogawa,
AIST , Japan |
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09:35-10:15 |
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KEYNOTE |
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Directed Self-Assembly Exploiting Combustion Synthesis for Next-Generation Nanomanufacturing |
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Reinhold H. Dauskardt,
Stanford University, USA |
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Chairperson: Gayle Murdoch & Ainhoa Romo Negreira |
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10:45-11:15 |
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INVITED |
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Graphene Capping for Advanced Interconnects |
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Kazuyoshi Ueno,
Shibaura Institute of Technology, Japan |
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11:15-11:35 |
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Ru epitaxy on differently oriented sapphire substrates for advanced interconnect applications |
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Christoph Adelmann,
imec, Belgium |
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11:35-11:55 |
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Inherent Area-Selective Deposition of Low-resistivity Molybdenum Carbide Films by Thermal Atomic Layer Deposition |
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Ji Sang Ahn,
Seoul National University of Science and Technology, South Korea |
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11:55-12:15 |
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PtCoO2 delafossite oxide thin films for advanced interconnects |
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Jean-Philippe Soulie,
imec, Belgium |
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12:15-12:35 |
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Electrical analysis of damascene patterned metal lines to evaluate patterning yield of EUV 0.33NA lithography |
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Stephane Lariviere,
imec, Belgium |
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Chairperson: Nicola Nastasi & Lin Hou |
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13:35-14:05 |
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INVITED |
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Back-end-of-line integration of emerging memory technologies for neuromorphic edge computing |
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Erika Covi,
Groningen University, The Netherlands |
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14:05-14:25 |
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Study ZnSb Phase Change Material Alloys for Nonvolatile Embedded-Memory Applications |
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Hamid Neggaz,
IM2NP,Université Aix Marseille , France |
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14:25-14:45 |
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Picking the Right TMD is the Key to Controlling Heat In a Phase Change Superlattice |
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Seppe Van Dyck,
Ghent University, Belgium |
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14:45-15:05 |
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Optimizing ultrathin HfO2-ZrO2 structures by ALD for BEOL-compatible ferroelectric non-volatile memories |
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Amanda Mallmann Tonelli,
CEA, France |
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15:05-15:25 |
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Ultrahigh-density ‘electrolithic’ storage memory proof-of-principle with high-aspect-ratio nanometer-sized holes |
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Senne Fransen,
imec, Belgium |
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15:25-17:30 |
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Poster Session - coffee and drinks |
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