Workshop - Enabling the industry scaling roadmap through ALD
In this topical workshop a mix of presenters from academia and industry will talk about the ways ALD is a vital enabling technology for advanced semiconductor technologies. Application drivers, fundamental process technologies and modelling will be discussed in the context of 3D device architectures 2D materials integration and emerging areas. At the end of the day an esteemed panned will share their views on this vital technology and its future use.
KEYNOTE
 
Anand Murthy
Lam
USA
 
INVITED
 
Robert Clark
TEL
USA
Cara-Lena Nies
Tyndall National Institute
Ireland
Mikko Ritala
University of Helsinki
Finland
Henrik H. Sønsteby
University of Oslo
Norway
Chiyu Zhu
ASM
Finland
 
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