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Esther Adegoke
University of Limerick, Ireland
Invited – MAM2025

Temilade (Esther) Adegoke is an Instrument Scientist at the Bernal Institute, University of Limerick (UL), where she manages the Transmission Electron Microscopy suite. She holds a B. Tech in Physics and Electronics (2015) from the Federal University of Technology Akure, Nigeria, an MSc in Applied Physics (2018), and a PhD in Materials Science (2023), both from University of Limerick, Ireland.
Her doctoral research focused on solution-based synthesis and the applications of high-throughput 1D nanostructures, combined with advanced TEM techniques, including liquid cell TEM and in situ heating TEM. After her PhD, she worked as a postdoctoral researcher with the TEMUL research group at UL, fabricating 2D ferroelectric materials and studying their structures using state-of-the-art Transmission Electron Microscopes.
Currently, her research interests encompass investigating the structure, properties, and performance of diverse materials, including semiconductors, metal alloys, polymers, and advanced composites.
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Paul Besser
Entegris, USA
Keynote – MAM2025

Dr. Paul Besser, Entegris, inc. As a Senior Director in the Advanced Technology Engagement Team at Entegris, Dr. Paul Besser is responsible for developing the corporate logic technology roadmap and partner engagement strategy. Paul’s career began at Advanced Micro Devices where he researched novel materials for semiconductor process technology, quickly becoming an AMD Fellow and leading technology development teams to take materials innovations from research to development to HVM. While at AMD, Paul held temporary assignments to imec to research CoSi2, Motorola to research Cu interconnects and IBM TJ Watson Research Center/Brookhaven National Lab to research NiPtSi and Cu interconnects. Between AMD and Entegris, Paul held senior technology leadership roles at Unity Semiconductor, GlobalFoundries, Lam Research and ARM. Paul attained his B.S. in Materials Science and Engineering at North Carolina State University and M.S. and Ph.D. in Materials Science and Engineering from Stanford University. He has co-authored >100 research publications and holds >260 U.S. patents. He was inducted into the NCSU Engineering Hall of Fame and has served on Conference Committees and chaired meetings of the Materials Research Society, IEEE IEDM, IEEE IRPS, Advanced Metallization Conference and IEEE International Interconnect Technology Conference.
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Robert Clark
TEL, USA
Invited – Workshop

Robert D. Clark, Ph.D. joined Tokyo Electron (TEL) in 2006 at TEL Technology Center, America, LLC (TTCA) in Albany, NY. In 2010 he relocated to Silicon Valley and in 2022 he moved to Belgium onsite at imec where he is currently a Senior Member of the Technical Staff and Technical Director. His research focuses on thin film process technologies for advanced and emerging devices, materials, and interconnect structures for use in semiconductor manufacturing. Dr. Clark has contributed to multiple ALD, CVD, etch and ancillary thin film processes for advanced CMOS contacts and high k and metal gate films/structures used currently in advanced logic and memory device manufacturing. Prior to joining Tokyo Electron, Dr. Clark was a Principal Research Chemist for Air Products and Chemicals, Inc. (APCI) where was the lead technologist for the development of high k and metal gate precursors and helped to develop the first precursor used for ALD high k gate dielectrics in CMOS manufacturing. Dr. Clark completed his Ph.D. in Chemistry at the University of California, Irvine in 2000 and B.S. and M.S. degrees in Chemistry at Virginia Polytechnic Institute and State University (Virginia Tech), Blacksburg, VA, USA in 1993 and 1995 respectively. Dr. Clark has served previously as the science advisory committee chair for SRC device sciences, and has received two SRC Mahboob Khan outstanding industrial liaison awards. He is a member of multiple conference committees including the AVS ALD, AVS ASD, VLSI-TSA, and IEDM conferences. At TEL he has been a U.S. employee of the year, and was co-inventor on two patents that have received the most impactful patent award for the U.S. in addition to being named a TEL Major Inventor in 2022. He has over 130 issued patents and has authored or co-authored hundreds of journal and conference publications including numerous invited/plenary talks and articles.
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Cyril Colin-Madan
STMicroelectronics Crolles, France
Invited – MAM2025

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Erika Covi
Groningen University, The Netherlands
Invited – MAM2025

Dr. Erika Covi is Assistant Professor at the Zernike Institute for Advanced Materials and the Groningen Cognitive Systems and Materials Centre, University of Groningen (the Netherlands), where she leads the Cognitive Systems (CoSy) Group. She received her PhD in Microelectronics in 2014 from the University of Pavia (Italy), where she worked on designing integrated systems for the characterisation of emerging memory devices in collaboration with Micron Technology Italy. She worked at the National Research Council (CNR) of Italy, at Politecnico di Milano (Italy), and as Senior Scientist at NaMLab gGmbH, Dresden (Germany), where she was the leader of the Cognitive Systems group. She was awarded with an ERC Starting Grant for the project MEMRINESS on the development of memristive neurons and synapses for neuromorphic edge computing in 2021. Her research interests lie at the intersection of emerging devices, circuit design, and brain-inspired computing. More specifically, they focus on extending the functionality of CMOS circuits by leveraging the intrinsic physical characteristics of emerging memory devices to design advanced cognitive systems.
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Reinhold H. Dauskardt
Stanford University, USA
Keynote – MAM2025

Reinhold Dauskardt is the Ruth G. and William K. Bowes Professor in the Department of Materials Science and Engineering and has additional appointments as Professor in Mechanical Engineering, the Biodesign Institute and the Department of Surgery, Stanford School of Medicine. The underlying theme of his research is to enable innovation and design of high-performance materials and devices by exploiting the fundamental connection between material structure and resulting thermomechanical function and reliability. His research group studies the chemistry and molecular structure of materials in bulk form or thin films and their thermo-mechanical behavior, adhesive and cohesive fracture properties, and behavior under complex loading and environmental conditions. Materials include thin-film and layered structures for nanoscience and energy technologies, high-performance laminates, biomaterials and soft tissues.
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Alberto Debernardi
IMM Agrate Brianza, Italy
Invited – MAM2025

Alberto Debernardi developed his professional experience mainly in computational materials science and the theory of nanostructured materials, addressing, in particular, new materials for ultra-scale electronics. Since summer 2004 he has been a senior researcher at the Italian Research Council, Agrate unit. He obtained a degree "Habilitation a' Diriger des Recherches" (2001) from the University of Strasbourg and a PhD (1995) from SISSA in Trieste. He has been principal investigator of several national supercomputing projects, and for 15 academic years he was a professor of the "Semiconductor Physics" course at the University of Milan. He has extensive experience in numerical simulation in condensed matter physics and his results are presented in more than 80 publications with more than 2000 citations in the scientific literature (source ISI web of science). His current research interests include high-dielectric oxides, quantum computing, nanoelectronics, spintronics, topological insulators, and hyperdoped semiconductors.
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Romain Duru
STMicroelectronics Crolles, France
Invited – MAM2025

Romain Duru joined STMicroelectronics in 2006, where he has held various positions in the field of metrology. Starting from the 300 mm pilot line in Crolles, he gradually transitioned to providing advanced support to R&D. Currently, as a Member of the Technical Staff in the Advanced Metrology group, his primary focus is on driving innovation and fostering development in metrology for thin films, materials and substrate characterization, all intricately linked with process control and manufacturing sciences. His expertise spans a wide array of integration schemes, including advanced nodes, 3D integration, and compound semiconductors
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Patrick Fiorenza
CNR-IMM, Italy
Invited – MAM2025

Patrick Fiorenza received the M.Sc. in Physics and the PhD in Material Science from the University of Catania in 2003 and 2007, respectively. In 2005, he was visiting scientist at IMEC (Belgium). Since 2011 he is part of the permanent staff at CNR-IMM and since 2023 he is Senior Researcher. His research activity is mainly focused on carrier transport, trapping phenomena and reliability at MIS and MS interfaces in SiC and GaN. He has a recognized experience in characterization of advanced materials and devices by scanning probe microscopy. He is co-author of about 200 papers , 4 patents and three book chapters.
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Inoue Fumihiro
Yokohama National University, Japan
Invited – MAM2025

Fumihiro Inoue is an Associate Professor and Vice-Director of the Semiconductor and Quantum Integrated Electronics Research Center at Yokohama National University. Previously, he worked at imec, focusing on unit processes for 3D integration until 2021. In recognition of his significant contributions to the field, he received the IEEE EPS Outstanding Young Engineer Award in 2022. Currently, he is involved in multiple national and international semiconductor projects in Japan, including the LSTC projects.
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Magali Grégoire
STMicroelectronics, France
Invited – MAM2025

Magali Grégoire manages silicide and contacts technological bricks development for STMicroelectronics (Crolles, France).

She defended a PhD in materials science on Cu interconnect reliability from University of Grenoble Alps and was hired by STMicroelectronics in 2005 as a process development engineer.

From 2005 to 2007, she spent 2 years to develop new chemical mechanical polishing processes for the very challenging isolation integration of advances CMOS devices.

From 2007, she focuses on new contact integrations based on a large scale of thin metallic films depositions (Ni, Co, Ti) on several substrates (Si, Ge, III/V). Based on solid collaborations with academic laboratories (LAAS, IM2NP, IEMN, GPM), and several ANR projects, a large enhancement of reliability and stability of both silicide and contacts integrations is then provided for numerous technologies included photonics (Nanoelec IRT Photonics from 2012). ST leader of the bi-lateral CEA-LETI/STMicroelectronics for advanced materials development, and recently graduated of the “Ability to conduct research” (HDR), Magali Grégoire authored or co-authored about 60 papers, supervises 10 PhD students, and she owns 10 US patents related to new microelectronic technologies.
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Patrick Hopkins
University of Virginia, USA
Invited – MAM2025

Patrick E. Hopkins is a Professor in Department of Mechanical and Aerospace Engineering at the University of Virginia, with courtesy appointments in the Department of Materials Science and Engineering and the Department of Physics. Patrick’s group at the University of Virginia uses various optical thermometry-based experiments to measure the thermal conductivity, thermal boundary conductance, emissivity, thermal accommodation, strain propagation and sound speed, and coupled electron, phonon, and photon mechanisms in a wide array of bulk materials and nanosystems. In 2021, Patrick co-founded Laser Thermal, Inc., a company based in Charlottesville Virginia that is commercializing thermal conductivity measurement systems that provide non-contact, automated metrologies for thermal properties of thin films, coatings and bulk materials.
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Christopher Jezewski
Intel, USA
Invited – MAM2025

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Guilhem Larrieu
LAAS-CNRS, France
Invited – MAM2025

Guilhem Larrieu is Director of Research at CNRS, working at LAAS-CNRS laboratory in Toulouse (France) and Research Fellow at the University of Tokyo (Japan). He is leading an activity on Nano-&Neuro-Electronics (NNE lab) aiming at developing advanced devices based on functional nanostructures for ultimate nanoelectronics and for innovative biosensor platforms in particular for neural interfacing. Guilhem Larrieu received a Ph.D. degree in Electronics in 2004 (Univ. Lille), then obtained a post-doctoral fellowship at the University of Texas at Arlington (UTA). In late 2005, he secured an independent researcher position at IEMN-CNRS laboratory in Lille on MOS transistor technology. In 2010 he moved to LAAS-CNRS to establish a new research axis on vertical nanowire based-devices. From 2019-2021, he was an Invited Researcher at the University of Tokyo to extend its nanoelectrode concepts to interface with high resolution human organoids. He has co-authored 90 publications in peer reviewed journals and 15 patents. He has served on Conference Committees of IEEE IEDM, IEEE ESSERC, IEEE NMDC, DATE, E-MRS.
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Pawel Michalowski
Lukasiewicz Institute for Microelectronics and Photonics, Poland
Invited – MAM2025

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Cristian Mocuta
SOLEIL synchrotron , France
Invited – MAM2025

Cristian Mocuta did his PhD on the study of ferromagnetic / antiferromagnetic metal - oxide surfaces and interfaces at CEA-Grenoble on the “Interface beamline” (ESRF, France). After a post-doctoral period at Max Planck Institute for Metal Research in Germany, followed by a beamline scientist position on ID-01 beamline at ESRF, he is presently working as scientist on DiffAbs beamline at SOLEIL Synchrotron (France). His research topic is mainly the characterization of crystalline materials using X-ray diffraction techniques, while focusing on experimental approaches based on rapid data acquisition (using area detectors) and their analysis and exploiting.
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Anand Murthy
Lam, USA
Invited – MAM2025

Anand Murthy is the Vice President of Advanced Technology Integration within the Office of the CTO at Lam Research Corporation. Anand manages various process technology initiatives in Logic and Memory with several research consortia fostering strong integration and collaboration. Prior to joining Lam this year, Anand was an Intel Fellow with over 28 years of technical and leadership experience in advancing Moore's law of transistor scaling over 10 process nodes. Anand holds 317 U.S. (over 800 worldwide) patents granted for pioneering work in the fabrication of CMOS and HBT transistors based on Si, SiGe, Ge and III-V compound semiconductor materials. Anand graduated from University of Southern California with Ph.D. in Materials Science and Engineering in 1993.
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Cara-Lena Nies
Tyndall National Institute, Ireland
Invited – Workshop

Dr Cara-Lena Nies is a researcher in the Materials Modelling for Devices group in Tyndall National Institute, University College Cork, Ireland. She is an expert in atomistic simulations of complex materials using Density Functional Theory, with a focus on developing advanced materials for nanoscale electronics and sustainable development. Her research interest is in application-targeted design of materials, such as developing optimal materials for manufacturing advanced interconnects.
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Shinichi Ogawa
AIST , Japan
Keynote – MAM2025

He graduated from the Faculty of Engineering at Kyoto University. Since 1978, he has been engaged in research and development in Si semiconductor process and characterization technologies, metal/semiconductor interface control, and Cu/low-k interconnect technology at Matsushita Electric Company (now Panasonic), Stanford University, Intel Corp., and Selete. Since 2010, he has conducted research on the application of gas field ion microscopy technology (for Si, two-dimensional materials a few nanometers thick, and high-temperature superconducting films tens of nanometers thick) at AIST and Osaka University. He holds a Doctorate in Engineering and has published more than 60 journal papers and over 130 international conference papers. Additionally, he has served as a committee member for several scientific conferences, including IITC, IRPS, MRS, FCMN, AVS, and SSDM. He enjoys lively discussions with colleagues over drinks and good food, which he finds to be a source of health and valuable ideas.
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Mikael Östling
KTH, Sweden
Invited – MAM2025

Mikael Östling received his MSc degree in engineering physics and the PhD degree from Uppsala University, Sweden in 1980 and 1983 respectively He has been with the faculty of EE of KTH, Royal Institute of Technology in Stockholm, Sweden since 1984 where he holds a position as professor in solid state electronics. He was the deputy president of KTH 2017-2022. Between 2000 and 2004 he was head of the department of Microelectronics and Information Technology. He was the dean of the School of Information and Communication Technology, KTH, between 2004 – 2012. Östling was a senior visiting Fulbright Scholar 1993-94 with the Center for Integrated Systems at Stanford University, and a visiting professor with the University of Florida, Gainesville. In 2005 he co-founded the company TranSiC (acquired by Fairchild Semiconductor). He has been frequently engaged as expert reviewer for the framework programs in EU and for the European Research Council. In 2009 he received the first ERC award for advanced investigator grant. His research interests are silicon/silicon germanium devices and process technology for very high frequency, as well as device technology for wide bandgap semiconductors with special emphasis on silicon carbide for high power applications. He has supervised 50 PhD theses work, and been the author of 1 textbook, 10+ book chapters and more than 600 scientific papers published in international journals and conferences. Mikael Östling was an editor of the IEEE Electron Device Letters 2005-2014 and an editor-in-chief of the IEEE Journal of Electron Devices Society 2016-19. Östling is a Life Fellow of the IEEE and Fellow of the ECS (The Electrochemical Society).
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Mikko Ritala
University of Helsinki, Finland
Invited – Workshop

Mikko Ritala is a professor at University of Helsinki. He is leading the HelsinkiALD research group and ALD center Finland national research infrastructure. He received his M.Sc. degree in 1991 from University of Turku, and Ph.D. in 1994 from University of Helsinki, both in inorganic chemistry. During 1995 - 2003 he worked at University of Helsinki, first as a postdoctoral researcher and then as an academy research fellow, both posts being granted by Academy of Finland. In 2003 he was nominated as a professor of inorganic materials chemistry at University of Helsinki.
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Stephan Roche
ICREA / ICN2, Spain
Invited – MAM2025

Prof. Stephan Roche is a theoretician with more than 25 years’ experience in the study of transport theory in low-dimensional systems, including graphene, carbon nanotubes, semiconducting nanowires, organic materials and topological insulators. He has published more than 250 papers in journals such as Nature, Review of Modern Physics, Nature Physics, Nano Letters and Physical Review Letters and he is the co-author of the book titled “Introduction to Graphene-Based Nanomaterials: From Electronic Structure to Quantum Transport” (Cambridge University Press, 2020-second edition). He received the qualification to supervise PhD students from the Université Joseph Fourier (Grenoble, France) in 2004, and since then he has supervised more than ten PhD students and about 25 postdoctoral researchers in France, Germany and Spain. In 2009 Prof. Roche was awarded the Friedrich Wilhelm Bessel Research Award by the Alexander Von-Humboldt Foundation (Germany) and, since 2011, he has been actively involved in the European Graphene Flagship project as deputy leader of the Spintronics Work Package (WP). He is serving as leader of this WP since April 2020 and will continue until March 2023. He is also Division Leader of the Graphene Flagship.
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Philippe Rodriguez
CEA-Leti, France
Invited – MAM2025

Philippe Rodriguez is a research engineer and laboratory manager at CEA-Leti in the Semiconductor Platforms Division.
He earned his Ph.D. in 2007 from the University of Lyon 1 in Materials Chemistry for his research on metal-organic vapor phase epitaxy growth of B(In)GaAs epilayers.
From 2007 to 2009, he worked at the CNRS (French National Center for Scientific Research), developing deposition methods on structured substrates for process intensification applications. In 2009, he joined the CEA (French Alternative Energies and Atomic Energy Commission), where he initially focused on the coating and fluidization of dense powders using fluidized bed metal-organic chemical vapor deposition for the development of new nuclear fuels (2009–2011). Subsequently, he worked on developing silica permeation barriers via magnetron sputtering for laser megajoule gas targets (2011–2013).
In October 2013, he joined CEA-Leti, where his research activities primarily centered on advanced contact technologies for electronics and photonics applications. His work includes developing contact metallization solutions for advanced CMOS and photonics devices (Si, Ge(Sn), III-V, and GaN materials), along with surface preparation and interface modulation prior to metallization. He led the contact team at CEA-Leti from 2017 to 2020 before being appointed head of the Advanced Materials Deposition Laboratory in February 2020.
In September 2022, he joined the Surface and Interface Science and Engineering Department and, as of January 2023, oversees the Laboratory of Wet Surface Preparation, Epitaxy, and Thermal Treatment Processes.
Philippe is the author or co-author of approximately 100 peer-reviewed journal or proceedings articles, 120 international conference contributions, 2 book chapters, and 15 patents.
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Isabelle Servin
CEA-LETI, France
Invited – MAM2025

Isabelle SERVIN is a research scientist at CEA-Leti, Grenoble (France). Since 2022, she joined the eco-innovation program as sustainability advisor for Technological Platforms. She is dedicated to the environmental impacts and sustainability of semiconductor manufacturing processes, through Life Cycle Assessment (LCA). She is involved in several programs aimed at reducing its environmental footprint of clean rooms.
She has 20 years of experience in the development of lithography processes for microelectronics, both in industry and R&D. She received her PhD on polymer chemistry from University Pierre & Marie Curie (Paris, France) in 1998 funded by SOLVAY Company
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Henrik H. Sønsteby
University of Oslo, Norway
Invited – Workshop

Henrik H. Sønsteby is currently working as an Associate Professor at the Center for Materials Science and Nanotechnology at the University of Oslo. He has been developing complex oxide ALD processes for integration in electronic devices for 15+ years, with a strong focus on low-temperature direct epitaxy. Functional properties span ferroelectrics, ferromagnets, superconductors, dielectrics, metallic conductors and semiconductors, all based on oxide perovskites, spinels and garnets. He is currently coordinating the EU Horizon project "CONCEPT", which aims to scale up the deposition of ferroelectrics for optoelectronics and future neuromorphic hardware
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Kazuyoshi Ueno
Shibaura Institute of Technology, Japan
Invited – MAM2025

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Bowen Zhang
Fraunhofer IKTS Dresden, Germany
Invited – MAM2025

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Chiyu Zhu
ASM, Finland
Invited – Workshop

 
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